| |
VM
182 |
| Measuring
standard |
Two-coordinate
DIADUR phase grating on steel |
| Signal
period |
4
µm in longitudinal and transverse directions |
| Coefficient
of thermal expansion |
atherm=
10 ppm/K |
Measuring
lengths ML
Measuring range in transverse direction |
420
mm, 520 mm, 1020 mm, 1220 mm, 1520 mm
± 1 mm |
| Reference
mark |
At
beginning of measuring length |
| Accuracy
grade |
±
1 µm in longitudinal direction
± 1.5 µm in transverse direction |
| Evaluation
electronics (option) |
IK
220
counter card for PCs |
| Evaluation
software (option) |
ACCOM
for AT-compatible PCs |
| Recommended
measuring steps |
1
µm, 0.1 µm, 0.01 µm |