|
NEW
|
 |
BL55
- High-speed response,
superior accuracy, and high environmental resistance
- Resolution of 0.1, 0.05,
and 0.01 µm (including special model)
- A wide range of new
Laserscales are offered - shield type with zero point, open type with
zero point, and low-expansion glass open type - and feature unrivaled
ease of installation
- Head signal pitch of 0.4
µm provides almost zero interpolation error
- Optical IC driven by the
latest semiconductor technology are used for a compact, energy efficient
design
- Typically not affected by
changes in temperature, humidity, or air presssure, or by atmospheric
fluctuations and uses low-expansion glass for enhanced measurement
stability(Compact, open type)
- Shield type design is
non-contact, which eliminates mechanical errors
- Maximum speed of 3,000
mm/s (analog output)
|
|
| NEW |
 |
BS78
- Compact LASERSCALE
with a zero point boosting a resolution of 0.14nm
- High-resolution
scale with signal wavelength of 0.1379 µm that out-performs light wave
interferometer systems
- High stability that
is not affected by humidity, air pressure, and air disturbances
- Newly designed
optics used in zero point.
- Half in volume with
zero point comparing to previous model
- Zero point accuracy
±0.1µm
- Accuracy: ±0.04µm
or better (for a measuring of 40 mm.)
- Complete
non-contact design. Return error is theoretically eliminated.
|
|
| |
 |
BS77
- High accuracy, compact design
- With easy operation
- Little affected by changes in humidity/atmospheric pressure and air
flow
- Non-contact head achieving high repeatability and extremely small
return error Applications
- Applications
Electron microscopes, wafer checkers, etc.
|
| |
 |
BS75A-R/RS
High accuracy laser
scales capable of high resolution (0.05µm/0.1µm), high-stability,
ultra high-precision measuring. Exposed type with a built-in optical
zero point, featuring a low expansion coefficient.
- Comparable to the laser interferometer in accuracy and resolution.
- Has a built-in high accuracy optical zero point.
- Various measuring lengths ranging from 30 to 410mm 9 models.
- Easy to install and adjust like Magnescaler
- Little affected by disturbed air and changing temperature and
atmospheric pressure
- Various interface modes
- Applications
semiconductor manufacture, inspection, precision machining and
testing.
|
| |
 |
BS75A/76
The BS75A and BS76
Series are high-accuracy laser scales with a low expansion coefficient
that provides reliable, hith-precision measuring with a resolution
selectable from 0.01µm, 0.05µm and 0.1µm.
- Comparable to the laser interferometer in accuracy and resolution.
- Measuring length : 30 mm to 410 mm/1.2" to 16.1"
(covered by 9 models)
- As easy to handle as Magnescale (installation/adjustment)
reliable.
- Little affected by disturbed air and changing atmospheric
pressure.
- Usable in vacuum of up to 10-5 Pa; Uses vacuum
resistant material.
- Various interface modes.
|
|
